Principle of Thermal Gas Flow Meter

『Principle of Thermal Gas Flow Meter』Related information(clamp on meter|electromagnetic meter|venturi meterrotameter|orifice meter|ultrasonic flow meter|mass flow meter|coriolis mass flow meter|coriolis flow meter|magnetic flow meter|magmeter flow meter|magflow flow meter|mag meter flow meter|electromagnetic flow meter|vortex flow meter|turbine flow meter|thermal mass flow meter|thermal flow meter|rotameter flow meter)

1. Yidu Library | Comparison of performance and application of laminar flow principle and thermal principle gas mass flow meters/controllers Comparison of performance and application between laminar flow principle and thermal principle gas mass flowmeter/controller (1) Gas microflow measurement and control is one of the important core technologies in high-end manufacturing industry, and its core sensors and control components are gas mass flowmeter and gas mass flow controller. These devices are mainly used for accurate measurement and control of small and micro flow (from 0.000001m ³/hour to 300m ³/hour, corresponding to pipe diameters ranging from 3mm to 65mm) gases. They require small volume, meticulous measurement and control, and can withstand the influence of environmental temperature and pressure as well as different gas working media. At present, there are two main principles of gas mass flow meters and controllers that meet these requirements: laminar flow principle and thermal principle.

First, laminar flow principle gas mass flowmeter/controller. The working principle of laminar flow principle gas mass flowmeter and controller is based on the characteristics of laminar flow.

. In laminar flow, gas molecules flow along the inner wall of the pipeline in a parallel and orderly manner. This flow characteristic creates a definite mathematical relationship between the mass flow rate of the gas and the pressure difference at both ends of the pipeline, as well as parameters such as the length and diameter of the pipeline. Therefore, by accurately measuring these parameters, accurate measurement and control of gas mass flow rate can be achieved. The gas mass flowmeter/controller based on laminar flow principle has the advantages of high precision, high stability, and long life, especially suitable for situations that require long-term stable operation and accurate measurement. In addition, due to the particularity of laminar flow principle, this type of equipment is insensitive to changes in gas type, temperature, pressure and other conditions, so it has a wide range of applications in practical use.

2. Thermal principle gas mass flowmeter/controller Thermal principle gas mass flowmeter and controller measure the mass flow rate of gas by using the heat changes generated by thermal sensitive elements (such as hot wires, hot films, etc.) in the gas flow.

. When gas flows through the thermistor, it will take away some of the heat, causing the temperature of the thermistor to decrease. By measuring the temperature change of the thermistor, the mass flow rate of the gas can be calculated. The gas mass flowmeter/controller based on the thermal principle has the advantages of fast response speed and wide measurement range, making it particularly suitable for situations that require fast response and accurate measurement. In addition, due to the particularity of the thermal principle, this type of equipment is sensitive to changes in gas types and flow rates, and therefore needs to be calibrated and corrected according to specific conditions in practical applications. III. Application Fields: Gas mass flow meters/controllers based on laminar and thermal principles are widely used in high-tech and high-end manufacturing industries. For example, in the manufacturing process of mobile phones, the vacuum coating machine is equipped with a large number of gas mass flow controllers to accurately control the amount of ionized

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